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Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms

Kyle J. Dorsey, Tanner G. Pearson, Edward Esposito, Sierra Russell, Baris Bircan, Yimo Han, Marc Z. Miskin, David A. Muller, Itai Cohen, and Paul L. McEuen
May, 2019

Advanced Materials 31 no. 29 (2019).